Temescal 1800 E-Beam Evaporator
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Description
Description:
The Temescal FC-1800 E-Beam Evaporator is designed for material deposition by evaporation.
Features:
- Load locked source tray for fast cycle time
- Fully automatic valve sequencing
- Deposition controller
- Electron Beam Power Supply with X-Y sweep
- Four pocket electron beam gun with motorized pocket indexer
- CTI Cryo pump and compressor
Specifications:
- 20" x 11" diameter chamber size bell jar
- Cycle time: 10 to 15 minutes for 1u of aluminum
- Coating uniformity: +/- 7% with high speed planetary substrate fixtures
- Source chamber: 18" diameter (457mm)
- Source tray: 19" diameter
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Temescal 1800 E-Beam Evaporator
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